Nitrogen Trifluoride (NF₃)
Competitive pricing • Fast delivery
Competitive pricing • Fast delivery
Overview
Nitrogen Trifluoride (NF₃) for semiconductor etching and chamber cleaning.
Product Description
Nitrogen Trifluoride (NF₃) is a colorless, odorless, and non-flammable gas. It is primarily used in the electronics and semiconductor industry as an etchant and for chamber cleaning processes. NF₃ is valued for its high reactivity with silicon compounds, making it effective in removing deposits from process chambers without damaging sensitive equipment.